Ana amfani da ruwan tabarau na F-Theta akai-akai tare da madubin daukar hoto na galvanometer a cikin tsarin sassaka, yankewa, da kuma alama na laser. Yawanci, ana ajiye karkacewar ruwan tabarau na F-Theta ƙasa da kashi 1% don ya sami damar samar da takamaiman wuri a cikin filin lebur akan saman hoton.
Juriyar diamita: +0/-0.13mm
Juriyar Kauri: ±0.25mm
Juriyar Tsawon Hankali: ±2%
Bambancin Kauri na Gefen (ETV): ≤3 arc min.
A share Buɗewar Hanya: >90%
Surface Flatness: λ/4 per 1″ Dia@632.8nm
Ingancin Sama: 40-20 SD
Rufin AR: R <0.2% a kowane saman @10.6μ