Duba rashin kyawun saman, tsayin matakai da kauri na fim mai siriri akan wafers na semiconductor, ruwan tabarau na gani daidai da abubuwan da aka shafa kai tsaye yana ƙayyade yawan samarwa. Binciken binciken lamba na gargajiya yana cire samfuran masu laushi cikin sauƙi, yayin da kayan aikin aunawa na gani na yau da kullun ba za su iya isar da daidaiton matakin nano ba. Ta yaya za a cimma gwaji mara lalata, daidaiton nano mai matuƙar girma da kuma duba yawan samar da kayayyaki mai yawa a lokaci guda?
Sabuwar na'urar auna haske mai haske ta masana'antu ta Wavelength OE tana da yanayin aunawa biyu na interferometry. Tare da ganowa ba tare da tuntuɓar juna ba, tana rufe cikakken aikin aiki daga bincike da ci gaba da gwaje-gwajen dakin gwaje-gwaje zuwa QC na samarwa ta yanar gizo.
Yanayin Interferometry Mai Ma'ana Biyu Don Duk Tsarin Sama
Ba kamar na'urorin auna yanayi ɗaya ba, wannan tsarin ya haɗa da tsarin VSI (Vertical Scanning Interferometry) da PSI (Phase-Shifting Interferometry), yana biyan buƙatun aunawa guda biyu ta hanyar na'ura ɗaya.
| Kayan Kwatanta | VSI / CSI | PSI |
|---|---|---|
| Babban Fuskokin da suka dace | Taurari masu kauri, matakai, yanayin ƙasa mai rikitarwa da rikitarwa | Saman madubi mai santsi, mai ci gaba da kuma madubi |
| Nisan Ma'aunin Tsayi a Tsaye | Faɗi mai faɗi; mai iya auna zurfin ramuka da matakai masu tsayi | Matsakaicin iyaka; bai dace da manyan matakai da aka ware ba |
| ƙudurin tsaye | Matakan Nanometer; ana iya cimma ƙaramin nanometer tare da ingantattun algorithms | Mafi girman ƙuduri; maimaitawa ƙasa zuwa ƙaramin nanometer har ma da matakin ƙaramin angstrom |
| Juriya ga Taushin Fuskar | Babban | Ƙasa |
| Matakin rashin tabbas | Kusan babu; akwai fitowar ƙimar tsayi mai cikakken tsayi | Ana iya fuskantar kuskuren naɗewa na lokaci na 2π |
| Auna Gudun | Yana buƙatar duba axial, mai jinkirin aiki | Gabaɗaya ya fi sauri |
| Juriyar Girgizawa | Yana iya jure girgiza yayin daukar hoto | Canjin lokaci mai yawa, mafi sauƙin amsawa ga girgiza |
| Aikace-aikace na yau da kullun | Tauri, tsayin mataki, ƙananan tsari, saman da aka yi da injina | Gwajin ƙaiƙayi mai santsi sosai, siffar saman da kuma lanƙwasa |
PSI (Matsayi Mai Canza Tsarin Jiki): Ya ƙware a fannin ƙananan siffofi masu tsayi na nano da kuma fina-finai masu siriri sosai, yana samar da ƙudurin microscopic na ƙarshe.
Madubin Jirgin Sama
Madubi Mai Lanƙwasa (Madubi Mai Lanƙwasa)
Samfurin Tsarin Photolithographic
Tsarin Dubawa na VSI a Tsaye: An inganta shi don kayan aiki masu manyan bambance-bambancen tsayi da tsayin matakai; cikakken kewayon aunawa yana samuwa ba tare da ɗaukar hoto a sassa daban-daban ba.
Jerin ƙananan ƙusoshi masu zagaye akan wafers ɗin da aka shirya na zamani
Jerin ƙananan kumbura masu kama da elliptical akan wafers ɗin da aka shirya na zamani
jerin microlens
An daidaita shi da tushen haske mai haske mai tsawon 450–700 nm, yana iya danne hasken da ya ɓace daga haske mai yawa kuma yana ba da ƙarfin hana tsangwama. An sanye shi da rufin haske mai faɗi da yawa, wannan ɓangaren haske mai ƙarancin haske zai iya fitar da siginar tsangwama mai karko da bambanci, yana samar da sakamako na aunawa na gaske da inganci.
2. Manyan Bayanan Nano-Grade a Masana'antu, Bayanan Dogon Lokaci Masu Iya Ganowa & Masu Tsabta
- Tsarin yana amfani da tushen haske mai haske na LED mai tsawon tsakiya a 550 nm, wanda aka sanye shi da manyan sigogin aiki waɗanda suka dace da ƙa'idodin ƙimar duniya.
-Kuskuren tsaye: ＜1 nm, kuskuren maimaita ma'auni: ＜10 nm, daidaiton nanometer na gaske
- Matsakaicin kewayon aunawa a tsaye: 500 μm, babu buƙatar sake saita wurin zama akai-akai ga ƙananan ƙananan gine-gine.
- Saurin dubawa: 100 μm/s, cikakken scan guda ɗaya an kammala shi cikin daƙiƙa 10, daidaita daidaito da kuma yadda ake sarrafa dubawa.
-Ya yi daidai da ƙa'idodin NIST da za a iya bibiya, tsarin daidaitawa ta atomatik da aka gina a ciki yana tabbatar da daidaiton bayanai na rukunin da za a iya bibiya, yana cika ƙa'idodin QC masu tsauri ga masana'antar semiconductor da na gani.
| Abu | Sigogi |
| Ƙarfin Aunawa | Tsarin saman 3D, ƙaiƙayin saman, tsayin matakai & kauri na fim na kayan haske da abubuwan gani |
| Yanayin Samun Bayanai | Tsarin Dubawa na Tsaye (VSI) + Tsarin Canzawa na Mataki (PSI) |
| Tsarin Daidaitawa | Tsarin NIST mai bin diddigin bayanai + tsarin daidaitawa ta atomatik |
| Nisan Aunawa a Tsaye | 500 μm |
| Filin Ra'ayi | 20× maƙasudi: 0.87 × 0.65 mm |
| Aikin Kyamara | Matsakaicin ƙuduri: 2048×2448; Ƙimar Tsarin: 74Fps; Zurfin Bit: 12 bit |
| Saurin Dubawa | 100 μm/s (Yanayin Daidaito) |
| Zaɓuɓɓukan Ruwan tabarau na Manufa | Manufofin ƙara girman 20x / 50x masu daidaitawa |
| Tsarin Shigarwa | Akwai dandamalin keɓancewa na girgiza mai aiki a ciki, hawa a kwance da tsaye. |
| Girman Gabaɗaya (L×W×H) | 120 × 80 × 65 cm |
| Cikakken nauyi | ≤58 kg |
3. Tsarin Kabad Mai Haɗaka na Masana'antu, Mai Dacewa da Layin Lab & Production
An inganta shi don bita na masana'antu da yawa da kuma dakunan gwaje-gwaje na kimiyya tare da dacewa mai sassauƙa na shigarwa.
Tsarin keɓewar girgiza mai aiki a ciki: Ma'aunin kwanciyar hankali a ƙarƙashin girgizar masana'anta, babu buƙatar ƙarin teburin keɓewar girgiza.
Tsarin hawa biyu: Saiti na kwance ko a tsaye, sauƙin haɗawa tare da layukan samarwa ta atomatik da wuraren aikin dakin gwaje-gwaje.
Ƙaramin jiki mai cikakken ƙarfi: Ƙaramin ƙafafu mai girman 120×80×65 cm, nauyi ≤58 kg, sauƙin tura shi a wurin.
Cikakken tsarin ya haɗa tushen haske, babban na'urar interferometer da kuma tsarin sarrafawa. Filogi-da-wasa bayan an cire kayan aiki, babu buƙatar daidaita hanyar gani mai rikitarwa.
Faɗin Faɗin Aikace-aikace don Masana'antu Mai Inganci
Masana'antar Semiconductor: Tsarin ƙasa na 3D da duba tsayin matakai na wafers na silicon da ƙananan nano.
Na'urorin hangen nesa na daidai: Gwajin tauri da kauri na fim don ruwan tabarau na gani, manufofi da abubuwan gani masu rufi.
Sabbin Rufin Aiki: Binciken yanayin saman da kauri na rufin da ke haskakawa da kuma siririn fim ɗin aiki.
Dakunan Binciken Kimiyya: Gwajin siffar tsarin micro-nano da daidaiton siffa ta ɓangaren.
Tare da shekaru na ƙwarewa a fannin R&D na gani, Wavelength OE tana haɓaka dukkan hanyoyin gani na asali da algorithms na aunawa don ma'aunin haske na fari. Cikakken iko na fasaha daga tushen haske, ruwan tabarau na zahiri zuwa tsarin daidaitawa. Kowane na'ura tana yin daidaito mai zagaye da yawa kafin isarwa. Muna ba da cikakken tallafin fasaha bayan tallace-tallace kuma muna keɓance mafita na aunawa na musamman bisa ga girman kayan aikin abokin ciniki da buƙatun layin samarwa ta atomatik.
Lokacin Saƙo: Yuli-15-2026